This video presents the work we have done on the interoperability between SECS/GEM and OPC-UA using an information model based on a research paper that we have designed together with CEA List with the support of european project Productive4.0
In the demo, we demonstrate the connection of a semi-conductor process equipment talking SECS/GEM (standardized by SEMI) to a MES talking OPC-UA (standardized within OPC Foundation).
This is done in a generic way based on a information model derived from E5 SECS-II as described in the following paper jointly written with CEA List:
The use case in the demonstration shows:
- Polling of multiple variables for data collection on process data like temperature and pressure
- Sending remote commands to equipment from the MES: RCMD PP-Select to select the process recipe to execute and RCMD Start
- Receiving collection events sent by the equipment to the MES on event occurence on the tool (like a door is opened, a recipe start or stop,...) with associated data grouped in reports defined using dynamic event report configuration