Industries

Semiconductor

Semi-conducteur

Semiconductor industry is Agileo Automation's historical domain of expertise.

A wide variety of equipment

We have experience controlling and connecting through SECS/GEM and GEM300 multiple equipment types:

Process

  • Atomic Layer Deposition (ALD)
  • Chemical Mechanical Polishing (CMP)
  • Ion implanter
  • Laser annealing tools
  • Molecular-Beam Epitaxy (MBE)
  • Oxidation furnaces
  • Plasma cleaning and etchers with Inductive Coupled Plasma (ICP), Bosch Process
  • Plasma Immersion Implantation
  • Pulsed Laser Deposition (PLD)
  • Physical Vapor Deposition (PVD)

Automation Handling

  • Bare Wafer stockers
  • Die bonders
  • Furnace loaders
  • Reticle sorters
  • Semi-bare Reticle stockers
  • Wafer sorters
  • Cluster tools with atmospheric and vacuum robots

Metrology Test

  • Automatic Test Equipment (ATE)
  • Flip chip and wafer 3D Inspection
  • In-situ metrology for process control
  • Optical Metrology for CD (Critical Dimension) and overlay registration

Many Substrates and Carriers

We have worked with all these substrates and carriers:

  • Wafer sizes from a few square millimeters for laboratories to 450mm including 150mm (6"), 200mm (8") and 300mm (12")
  • Thin wafers, Taiko wafers, Wafers on wafer carrier,
  • End effectors: Edge contact, Vacuum, Bernouilli optionally with Flip capability
  • Wafer carriers: FOUP (Front Opening Unified Pods), FFO (FOUP For One), Open cassette, SMIF pods
  • Reticles in RSP (Reticle SMIF Pods) boxes, semi-bare boxes, Canon, Nikon, ASML, Toppan, Hoya, DMS box, EUV reticles

Robot Isel manipulation wafer semi-conducteur

Fabs all over the world

We have commissioned tools all other the word and we know the specific requirements of fabs (names are not disclosed for confidentiality sake):

America

  • Idaho, USA
  • Florida, USA
  • New York, USA
  • Massachusets, USA
  • Canada

Europe

  • Austria
  • France
  • Germany
  • Italy
  • United Kingdom
  • Switzerland

Asia

  • China
  • Malaysia
  • Singapore
  • South Korea
  • Taiwan
semiconductor cluster tool secs/gem connectivity

Dedicated products

Agileo Automation has capitalized on its diversified experience to develop software products that enable semiconductor OEMs to :

  • Be in the right "time to market".
  • Reduce their software development effort
  • Focus on their core business

We propose field-proven products for the semiconductor industry:

  • Agil'GEM: a SECS/GEM library to connect equipment to the Fab IT system (Host or MES)
  • Speech Scenario: a Host or Equipment emulator to validate SECS/GEM communication before delivery
  • A²ECF Semi: A software framework to develop applications controlling tools ranging from standalone process modules to complex cluster tools with multiple process modules and robotics. It also provides SECS/GEM or GEM300 connectivity and Equipment Data Acquisition (EDA also known as Interface-A)
  • Agil'Sorter: An application based on A²ECF Semi to control wafer sorter tools

EFEM 150mm et 200mm avec robot de chargement de wafer

SEMI Member Agileo Automation

 

Agileo automation

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