SEMI Equipment Data Acquisition (EDA) / Interface A server
SEMI Equipment Data Acquisition (EDA) / Interface A server
Agil'EDA implements Equipment Data Acquisition (EDA), a set of SEMI standards, providing a secure, high-performance connectivity solution.
What is EDA?
EDA is a set of SEMI standards (commonly called Interface A) for data exchange between semiconductor equipment and factory systems. It provides structured and high-frequency data from tools and complements SECS/GEM by adding secured communication and advanced data modeling.
SEMI creates EDA Freeze versions that specify which standards should be used together to enable EDA functionality on tools or within fabs. There are three versions of Freeze:
- Freeze 1: based on SOAP. This version is no longer used.
- Freeze 2: based on SOAP. This is the currently used version which has been released in 2010.
- Freeze 3: based on gRPC. This version has not been released by SEMI yet, but is expected mid-2026.
All major fabs now require EDA Freeze 2.
Why Agil'EDA?
Agil'EDA enables the secure, high-performance collection of structured equipment data through:
- Equipment control (SECS/GEM) and data acquisition separation to ensure tool productivity is not impacted by data collection
- High-frequency data collection through a dedicated EDA server
- Concurrent access of multiple factory applications to collect data for different use cases
- Standardized and rich equipment models for monitoring, analytics and AI applications
- Secure equipment data access through authentication and encrypted communication
- Future-proof architecture, designed for a seamless transition to the high-performance EDA Freeze 3 standard (gRPC/HTTP2)
Agil'EDA integration architecture
Features
- EDA Freeze 2 compliant interface compatible with existing fab infrastructures
- Load, validate and publish SEMI-compliant equipment models
- Connect equipment controller data through Equipment Binding Interface (EBI) and its platform-independent gRPC API
- Logging and time tracing for performance analysis and troubleshooting
- Equipment builder APIs for equipment model implementation and runtime adaptations
- Deploy modularly as an independent component or leverage the existing integration with A²ECF-SEMI
- Validate EDA integration using the included local graphical EDA client
SEMI standards
Agil'EDA supports the following standards:
- SEMI E-120 - Common Equipment Model (CEM)
- SEMI E-125 - Equipment Self Description (EqSD)
- SEMI E-132 - Equipment Client Authentication and Authorization
- SEMI E-134 - Data Collection Management
- SEMI E-164 - EDA Common Metadata
Screenshot of the integrated graphical client included with the product, demonstrating Agil'EDA's practical usage and key functionalities
Development environment
- C# API and samples
- Microsoft .NET® Framework 4.6.2 or .NET® Runtime 8.0
- Available on Microsoft Windows® 10 and 11 (x86 / x64) and Linux
Documentation
Agileo Automation provides its customers with extensive documentation, including not only a developer's guide explaining how to use all applications and tools at your disposal, but also how to build your equipment model yourself.
