A²ECF on RECIF 450mm/300m EFEM

Agileo Automation and RECIF Technologies announced today that, Agileo’s A²ECF equipment controller solution has successfully been integrated with RECIF 450mm/300mm EFEM

The Agileo Automation team employed 3 days to customize the robot drivers for the A²ECF solution to be able to control the RECIF 450mm/300mm EFEM. A²ECF is an equipment automation software solution that supports major EFEM platforms and delivers process and alarm management, recipe management, SEMI E95 compliant graphical user interface, and customizable schedulers with graphical representation.